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Author Topic: What gas may be used for tungsten deposition?  (Read 2976 times)

Offline jaypal

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What gas may be used for tungsten deposition?
« on: 25/03/2009 09:49:39 »
Hi , anyone aware of precusor gas used for tungsten depositon in FIB ?
« Last Edit: 06/04/2009 23:34:46 by chris »


 

Offline Chemistry4me

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Re: What gas may be used for tungsten deposition?
« Reply #1 on: 28/03/2009 07:54:20 »
I believe it is tungsten hexacarbonyl (W(CO)6)
 

Offline Chemistry4me

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Re: What gas may be used for tungsten deposition?
« Reply #2 on: 28/03/2009 07:55:54 »
Quote
In this study we investigate the nucleation and growth mechanisms of tungsten films processed by focused ion beam (FIB) induced chemical vapor deposition. For our investigation we use a 50keV Ga+ ion beam focused on the substrate target and tungsten hexacarbonyl (W(CO)6) as precursor gas.

http://www.mrs.org/s_mrs/sec_subscribe.asp?CID=2572&DID=118888&action=detail
 

Offline jaypal

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Re: What gas may be used for tungsten deposition?
« Reply #3 on: 30/03/2009 08:12:33 »
folk,

   Thanks for your reply , what is pratical  tungsten resistivity achivable using CVD process in FIB .
 

Offline jaypal

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Re: What gas may be used for tungsten deposition?
« Reply #4 on: 30/03/2009 08:15:12 »
any process related document on W(CO)6 depostion using FIB

better the carbon is best or ?
 


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Re: What gas may be used for tungsten deposition?
« Reply #5 on: 30/03/2009 08:50:48 »

 

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