Wet etch of SiN4 using chemical

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Offline jaypal

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Wet etch of SiN4 using chemical
« on: 30/03/2009 08:20:50 »
post your comments on wetetch of  silicon nitrade etch using chemical

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Offline Chemistry4me

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Wet etch of SiN4 using chemical
« Reply #1 on: 30/03/2009 08:52:11 »
Heated Phosphoric Acid.

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Offline jaypal

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Wet etch of SiN4 using chemical
« Reply #2 on: 30/03/2009 09:29:55 »
hi,

  Heated phosophoric acid will corrode bond wire ?

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Offline Chemistry4me

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Wet etch of SiN4 using chemical
« Reply #3 on: 30/03/2009 09:35:08 »
What wire?

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Offline Chemistry4me

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Wet etch of SiN4 using chemical
« Reply #4 on: 30/03/2009 09:38:49 »
Wait a second, I thought you meant silicon nitride!
Does silicon nitrade even exist? I searched on Google and can't find anything on the structure. [???]

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Offline jaypal

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Wet etch of SiN4 using chemical
« Reply #5 on: 30/03/2009 09:46:48 »
silicon nitride is the passivation processed on top layer

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Offline Chemistry4me

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Wet etch of SiN4 using chemical
« Reply #6 on: 30/03/2009 09:51:02 »
Read http://people.cecs.ucf.edu/todi/Publication1.pdf from page 110.
I think that is what you are looking for. [:)]

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Offline Dr.IC

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Wet etch of SiN4 using chemical
« Reply #7 on: 31/03/2009 04:59:15 »
Is there any other way, because we need Plasma etch machine to do this.... Like using only chemical without machine. [???].....

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Offline lightarrow

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Wet etch of SiN4 using chemical
« Reply #8 on: 31/03/2009 13:05:13 »
Is there any other way, because we need Plasma etch machine to do this.... Like using only chemical without machine. [???].....
Quote
Wet etching studies were performed using two etchants, namely phosphoric acid (85% H3PO4) and  buffered oxide etch (BOE) solution. BOE consisted of 9 parts of NH4F (40%) and 1 part of HF (49%) by volume.