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You probably don't want to be making these things at home. I wouldn't handle them outside of a fume hood (their vapors react with water to make SiO2, so it will essentially react with your eyes and lungs to make sand.) Typically they are made from SiCl4 (which is way nastier, reacting with your eyes to make sand and hydrochloric acid!) I once accidentally "welded" my glassware together when using SiHCl3 on a humid day because it was slowly leaking out the joint between my flask and the condenser, and as soon as it contacted the humid air, it turned to glass and acid. I had to cut the condenser off to get my product out!Is the TEOS your final goal, or is there perhaps another way to get what you really are after?